メガピクス

device nameInstruments name

Exterior

機器名全景

door open

イメージ2

sample stand

イメージ3

Overview

This is a coater dedicated to carbon vapor deposition that can easily produce observation samples for EPMA and SEM of nonconductor and semiconductor samples. Anyone can easily perform carbon deposition. Since the film thickness is determined to be 30 Å (Ongstrom) per flash, please repeat the flash several times until the desired film thickness is achieved. Easy to operate, just open the lid, insert the sample, and press the button to automatically flash the desired number of flashes. Please contact Sakurai General Equipment Center for use. (extension:3242)

Name (abbreviation) Carbpn Coater
Model number (manufacturer) SC-701CT(Sanyu Electronics Co., Ltd.)
Number of coatings 1 to 19 times arbitrary setting
Coating thickness 30 Å/time
Coating time 0.3 sec/times
Chamber φ160 mm X D160 mm
Installation location Building C3 2nd floor equipment room ⑨
Equipment manager General Equipment Center Director (Department of Chemistry, Masanori Yamada)

Contact us

Please feel free to contact us from the following.

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