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Overview
This is a coater dedicated to carbon vapor deposition that can easily produce observation samples for EPMA and SEM of nonconductor and semiconductor samples. Anyone can easily perform carbon deposition. Since the film thickness is determined to be 30 Å (Ongstrom) per flash, please repeat the flash several times until the desired film thickness is achieved. Easy to operate, just open the lid, insert the sample, and press the button to automatically flash the desired number of flashes. Please contact Sakurai General Equipment Center for use. (extension:3242)
Name (abbreviation) | Carbpn Coater |
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Model number (manufacturer) | SC-701CT(Sanyu Electronics Co., Ltd.) |
Number of coatings | 1 to 19 times arbitrary setting |
Coating thickness | 30 Å/time |
Coating time | 0.3 sec/times |
Chamber | φ160 mm X D160 mm |
Installation location | Building C3 2nd floor equipment room ⑨ |
Equipment manager | General Equipment Center Director (Department of Chemistry, Masanori Yamada) |
Contact us
Please feel free to contact us from the following.