field emission scanning electron microscopeUltra High Resolution Field Emission Scanning Electron Microscopes
Exterior
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Overview
It is a scanning electron microscope with an energy dispersive elemental analyzer capable of obtaining observation images with a magnification of about 500,000 times. As for image observation, secondary electron images and backscattered electron images can be observed, and composition images can also be obtained. Observable samples measure within 8 mm in height and 5 cm in diameter. It is easy to operate, and even beginners can observe images after taking several lessons.
| Name (abbreviation) | Ultra-high resolution scanning electron microscope（Fe-SEM ） |
|---|---|
| Model number (manufacturer) | SU8010（Hitachi） |
| Resolution | 1nm |
| Accelerating voltage | 0.5～30Kv |
| Magnification | X 30～500.000 |
| Usage | This is a device for observing the surface shape of a sample. By reducing the acceleration voltage, it is now possible to observe samples without vapor deposition, which previously required vapor deposition before observation, making it possible to observe fine structures. |
| Installation location | Room 6, 2nd floor, Building C3 |
| Equipment manager | Tatsuyuki Nakatani, Rontier Science and Engineering Research Institute |
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