Electron probe surface analyzerElectron Prove Microanalyzer

Exterior

Goniometer part

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Overview

It is possible to perform elemental analysis of minute parts (μm order) while observing an electron microscope image (SEM). It can be displayed as a secondary density distribution color image (surface analysis) based on information such as characteristic X-rays from the sample and image signals (secondary electrons, reflected electrons). Qualitative analysis and semi-quantitative analysis using energy dispersive spectroscopy (EDS) are easy and the results can be obtained in real time. Due to its good position reproducibility, if the analysis position is preset and the analysis conditions are determined, a large number of analytical operations can be automatically performed from the workstation, quantitative analysis can be performed at high speed, and analysis data can be collected and processed.