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Electron Prove Microanalyzer

 OutlineOutline

The JXA-8230 allows quantitative element analysis of micro- spot (μm order) with observation of electron microscope images (SEM). The accelerated electron beam irradiates the specimen to generate characteristic X-rays, secondary electrons, backscattered electrons, and cathodoluminescence. The JXA-8230 detects these signals performing color element mapping in both micro- and macro-size areas. Qualitative and semi-quantitative analysis using the energy dispersive spectrometer (EDS) are simple and the results can be obtained in real time. Since the position reproducibility is good, the user can perform easily a large amount of quantitative analysis using the preset analytical position and the saved analytical condition.

 PerformancePerformance

Name (abbreviation) Electron Prove Microanalyzer(WDS)
Model number (manufacturer) JXA-8230 (JEOL)
Detectable element range 5B~92U
Accelerating voltage 0.2~30kV
Secondary electron image resolution 6nm
Maximum magnification ×300,000
Observation images SEI、BSI、OM、COMPO、CL
Installation location Room ⑤, 2nd floor, Building C3
Equipment manager

IFST Takeshi Imayama

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